Biography
Eugene A. Irene
Professor
Ph. D., Rensselaer Polytechnic Institute, 1972
University of North Carolina, Chapel Hill
Department: Chemistry
Address: Venable Hall 11-4
Email:
gene_irene@unc.edu
Homepage:
http://www.chem.unc.edu/people/faculty/ireneea/eaiindex.html
Phone: 919-966-1652
Fax: 919-962-2388
Research Statement:
Professor Irene's research interests center on thin films and interfaces that involve microelectronics materials. His group specializes in in situ real-time studies of the kinetics of film formation such as: the oxidation of semiconductors, ion beam sputtering and the chemical vapor deposition of thin films. Film preparation techniques utilize ion beams, plasmas and rapid thermal processes. In situ real-time studies use spectroscopic ellipsometry to determine film growth dynamics and ion scattering and recoil analysis is used for structure and composition while films grow. Optical properties studies of thin films and surfaces are performed using spectroscopic ellipsometry and film morphology studies are performed using transmission and scanning electron and optical microscopy and atomic force microscopy and Fractal analysis. Electrics properties studies are also performed on thin films such as: reliability, charge storage, conductivity, capacity, interface and bulk charge, interface states, quantum oscillations and charge trapping. Over the years the Irene group has gained experience with dielectric films, wide and narrow gap semiconductors, high temperature superconducting oxides, high K dielectrics and organic materials.
Education:
| 1959-63 | B.S., Chemistry, Manhattan College, New York, NY |
| 1969-72 | Ph.D., Chemistry, Rensselaer Polytechnic Institute, Troy, NY |
Positions:
| 1982- | Professor, Department of Chemistry, University of North Carolina |
| 1987-90 | Vice Chair, Department of Chemistry, University of North Carolina |
| 1972-82 | Research Staff Member, IBM Thomas J. Watson Research Center, Yorktown Heights, NY |
| 1963-69 | U.S.A.F. Officer |
Selected Honors:
- ISI Highly Cited Researcher, (2002)
- Visiting Fellow, University of Paris, Paris, France, Summer (1998).
- Conference Chair, Second International Conference on Spectroscopic Ellipsometry, Charleston SC (1997)
- Visiting Fellow Ecole Central de Lyon, Lyon , France, Summer (1995).
- Fellow of American Vacuum Society (1997).
- Callinan Award, Electrochemical Society (1988).
- IBM Invention Achievement Award (1980) Bronze Star Medal (1969).
